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hal.structure.identifierLaboratoire réactivité et chimie des solides - UMR CNRS 7314 [LRCS]
dc.contributor.authorTHIMONT, Yohann
hal.structure.identifierLaboratoire réactivité et chimie des solides - UMR CNRS 7314 [LRCS]
dc.contributor.authorCLATOT, Johnny
hal.structure.identifierNational Institute for Lasers, Plasmas and Radiation Physics [NILPRP]
dc.contributor.authorNISTOR, Magda
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorLABRUGÈRE, Christine
hal.structure.identifierLaboratoire réactivité et chimie des solides - UMR CNRS 7314 [LRCS]
dc.contributor.authorROUGIER, Aline
dc.date.issued2012
dc.identifier.issn0927-0248
dc.description.abstractEnThe growth of Zn-based thin films, from pure ZnF2 to pure ZnO, has been investigated as a function of the oxygen partial pressure and substrate temperature using pulsed laser deposition. Starting from (1−x) ZnO−x*ZnF2 target compositions, ZOF films containing a low fluorine content (x<0.10) have been successfully deposited. These films exhibit typical ZnO wurtzite structure while maintaining the (002) preferred orientation. The fluorine doping does not modify the film transparency (T≈90%), whereas for a high fluorine content, a large haze effect is observed. Such effects are associated with increased surface roughness. The Hall effect measurements show a beneficial effect with the addition of F corresponding to a decrease in resistivity for ZOF thin films accounting for oxygen to fluorine substitution in the ZnO structure. In contrast, attempts at annealing in air of successfully deposited pure ZnF2 thin films does not lead to increased conductivity in the films; this is associated with a progressive transformation from ZnF2 to ZnO. Finally, improvements in the electrical properties are proposed for F and Si co-doping, and resistivities as low as 7.2×10−4 Ω cm for SZOF thin films deposited at RT from a ZnO (87 at%)-ZnF2 (10 at%)-SiO2 (3 at%) target are achieved.
dc.language.isoen
dc.publisherElsevier
dc.title.enFrom ZnF2 to ZnO thin films using pulsed laser deposition : Optical and electrical properties
dc.typeArticle de revue
dc.identifier.doi10.1016/j.solmat.2012.07.008
dc.subject.halChimie/Matériaux
bordeaux.journalSolar Energy Materials and Solar Cells
bordeaux.page136-141
bordeaux.volume107
bordeaux.peerReviewedoui
hal.identifierhal-00737910
hal.version1
hal.popularnon
hal.audienceInternationale
dc.subject.esPulsed laser deposition
dc.subject.esZnO
dc.subject.esZnF2
dc.subject.esOptical properties
dc.subject.esElectrical properties
dc.subject.esCo-doping
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-00737910v1
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