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Gas discrimination by simultaneous sound velocity and attenuation measurements using uncoated capacitive micromachined ultrasonic transducers
(Scientific Reports. vol. 12, n° 1, 2022-01-14)Article de revueLibre acceso -
Examples of vibrating MEMS sensing physical parameters for chemical gas detection
(Springer Berlin Heidelberg, 2023-10-19)Chapitre d'ouvrageLibre acceso -
A Simple Process for the Fabrication of Parallel-Plate Electrostatic MEMS Resonators by Gold Thermocompression Bonding
Actes de congrès/ProceedingsLibre acceso -
A New Approach in the Field of Hydrogen Gas Sensing Using MEMS Based 3C-SiC Microcantilevers
(13th European Conference on Silicon Carbide and Related Materials, ECSCRM 2020·2021, fr, Tours, 2022-05-31)Communication dans un congrès avec actesLibre acceso -
Silicon-carbide-based MEMS for gas detection applications
(Materials Science in Semiconductor Processing. vol. 171, pp. 107986, 2024-03-01)Article de revueSolicitar copia