Show simple item record

dc.rights.licenseopenen_US
hal.structure.identifierLaboratoire de Chimie des Polymères Organiques [LCPO]
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
hal.structure.identifierCentre de Recherche Paul Pascal [CRPP]
dc.contributor.authorCUMMINS, Cian
hal.structure.identifierLaboratoire de Chimie des Polymères Organiques [LCPO]
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorPINO, Guillaume
hal.structure.identifierLaboratoire de Chimie des Polymères Organiques [LCPO]
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorMANTIONE, Daniele
hal.structure.identifierLaboratoire de Chimie des Polymères Organiques [LCPO]
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorFLEURY, Guillaume
dc.date.accessioned2020-12-01T14:52:10Z
dc.date.available2020-12-01T14:52:10Z
dc.date.issued2020-10-28
dc.identifier.urioai:crossref.org:10.1039/d0me00118j
dc.identifier.urihttps://oskar-bordeaux.fr/handle/20.500.12278/21284
dc.description.abstractEnRecently engineered high χ-low N block copolymers for nanolithography are evaluated. Synthetic routes together with thin film processing strategies are highlighted that could enable the relentless scaling for logic technologies at sub-10 nanometres.
dc.language.isoENen_US
dc.sourcecrossref
dc.title.enEngineering block copolymer materials for patterning ultra-low dimensions
dc.typeArticle de revueen_US
dc.identifier.doi10.1039/d0me00118j
dc.subject.halChimie/Matériaux
bordeaux.journalMolecular Systems Design & Engineeringen_US
bordeaux.hal.laboratoriesLaboratoire de Chimie des Polymères Organiques (LCPO) - UMR5629en_US
bordeaux.institutionBordeaux INPen_US
bordeaux.institutionUniversité de Bordeauxen_US
bordeaux.peerReviewedouien_US
bordeaux.inpressnonen_US
bordeaux.import.sourcedissemin
hal.identifierhal-03034199
hal.version1
hal.date.transferred2020-12-01T15:28:57Z
hal.exporttrue
workflow.import.sourcedissemin
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Molecular%20Systems%20Design%20&%20Engineering&rft.date=2020-10-28&rft.au=CUMMINS,%20Cian&PINO,%20Guillaume&MANTIONE,%20Daniele&FLEURY,%20Guillaume&rft.genre=article


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record