Chemically Amplified Photoresists for 193-nm Photolithography: Effect of Molecular Structure and Photonic Parameters on Photopatterning
| dc.rights.license | open | |
| dc.contributor.author | RIDAOUI, Hassan | |
| dc.contributor.author | DIRANI, Ali | |
| dc.contributor.author | SOPPERA, Olivier | |
| hal.structure.identifier | Laboratoire d'Ingenierie des Polymères pour les Hautes Technologies | |
| dc.contributor.author | ISMAILOVA, Esma | |
| hal.structure.identifier | Laboratoire d'Ingenierie des Polymères pour les Hautes Technologies | |
| dc.contributor.author | BROCHON, Cyril | |
| hal.structure.identifier | Laboratoire d'Ingenierie des Polymères pour les Hautes Technologies | |
| dc.contributor.author | SCHLATTER, Guy | |
| hal.structure.identifier | Laboratoire de Chimie des polymères organiques [LCPO] | |
| dc.contributor.author | HADZIIOANNOU, Georges | |
| hal.structure.identifier | Lithography Laboratory | |
| dc.contributor.author | TIRON, Ralouca | |
| hal.structure.identifier | Lithography Laboratory | |
| hal.structure.identifier | Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information [CEA-LETI] | |
| dc.contributor.author | BANDELIER, Philippe | |
| hal.structure.identifier | Lithography Laboratory | |
| dc.contributor.author | SOURD, Claire | |
| dc.date.accessioned | 2020 | |
| dc.date.available | 2020 | |
| dc.date.created | 2010 | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 0449-2951 | |
| dc.identifier.uri | https://oskar-bordeaux.fr/handle/20.500.12278/20592 | |
| dc.language.iso | en | |
| dc.publisher | John Wiley & Sons | |
| dc.title.en | Chemically Amplified Photoresists for 193-nm Photolithography: Effect of Molecular Structure and Photonic Parameters on Photopatterning | |
| dc.type | Article de revue | |
| dc.subject.hal | Chimie/Matériaux | |
| dc.subject.hal | Chimie/Polymères | |
| bordeaux.journal | Journal of polymer science: Part A, General papers | |
| bordeaux.page | 1271-1277 | |
| bordeaux.volume | 48 | |
| bordeaux.hal.laboratories | Laboratoire de Chimie des Polymères Organiques (LCPO) - UMR 5629 | * |
| bordeaux.issue | 6 | |
| bordeaux.institution | Bordeaux INP | |
| bordeaux.institution | Université de Bordeaux | |
| bordeaux.peerReviewed | oui | |
| hal.identifier | hal-00485616 | |
| hal.version | 1 | |
| hal.origin.link | https://hal.archives-ouvertes.fr//hal-00485616v1 | |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Journal%20of%20polymer%20science:%20Part%20A,%20General%20papers&rft.date=2010&rft.volume=48&rft.issue=6&rft.spage=1271-1277&rft.epage=1271-1277&rft.eissn=0449-2951&rft.issn=0449-2951&rft.au=RIDAOUI,%20Hassan&DIRANI,%20Ali&SOPPERA,%20Olivier&ISMAILOVA,%20Esma&BROCHON,%20Cyril&rft.genre=article |
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