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Sub-10 nm Features Obtained from Directed Self-Assembly of Semicrystalline Polycarbosilane-Based Block Copolymer Thin Films

dc.rights.licenseopen
hal.structure.identifierLaboratoire de Chimie des Polymères Organiques [LCPO]
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorAISSOU, Karim
hal.structure.identifierLaboratoire de Chimie des Polymères Organiques [LCPO]
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorMUMTAZ, Muhammad
hal.structure.identifierLaboratoire de Chimie des Polymères Organiques [LCPO]
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorFLEURY, Guillaume
hal.structure.identifierNWO DUBBLE CRG [ESRF, Netherlands Org Sci Res]
dc.contributor.authorPORTALE, Giuseppe
hal.structure.identifierGroupement de recherches de Lacq [GRL]
dc.contributor.authorNAVARRO, Christophe
hal.structure.identifierLaboratoire de Chimie des Polymères Organiques [LCPO]
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorCLOUTET, Eric
IDREF: 151048681
hal.structure.identifierLaboratoire de Chimie des Polymères Organiques [LCPO]
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorBROCHON, Cyril
hal.structure.identifierMIT, Dept Mat Sci & Engn
dc.contributor.authorROSS, Caroline A.
hal.structure.identifierLaboratoire de Chimie des Polymères Organiques [LCPO]
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorHADZIIOANNOU, Georges
dc.date.accessioned2020
dc.date.available2020
dc.date.issued2015
dc.identifier.issn0935-9648
dc.identifier.urihttps://oskar-bordeaux.fr/handle/20.500.12278/20270
dc.description.abstractEnHighly-ordered arrays with sub-10 nm features are produced with topographical-directed self-assembly of low-molecular-weight poly(1,1-dimethyl silacyclobutane)block-poly(methyl methacrylate). This system turns out to be of high interest for lithographic applications since the domain orientation is solely controlled through the polymer layer thickness, while the promotion of the microphase separation is obtained by a short thermal annealing process under mild conditions.
dc.language.isoen
dc.publisherWiley-VCH Verlag
dc.subject.enARRAYS
dc.subject.enRING-OPENING POLYMERIZATION
dc.subject.enDIBLOCK COPOLYMER
dc.subject.enTEMPLATES
dc.subject.enLITHOGRAPHY
dc.title.enSub-10 nm Features Obtained from Directed Self-Assembly of Semicrystalline Polycarbosilane-Based Block Copolymer Thin Films
dc.typeArticle de revue
dc.identifier.doi10.1002/adma.201404077
dc.subject.halChimie/Polymères
bordeaux.journalAdvanced Materials
bordeaux.page261-265
bordeaux.volume27
bordeaux.hal.laboratoriesLaboratoire de Chimie des Polymères Organiques (LCPO) - UMR 5629*
bordeaux.issue2
bordeaux.institutionBordeaux INP
bordeaux.institutionUniversité de Bordeaux
bordeaux.peerReviewedoui
hal.identifierhal-01361353
hal.version1
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-01361353v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Advanced%20Materials&rft.date=2015&rft.volume=27&rft.issue=2&rft.spage=261-265&rft.epage=261-265&rft.eissn=0935-9648&rft.issn=0935-9648&rft.au=AISSOU,%20Karim&MUMTAZ,%20Muhammad&FLEURY,%20Guillaume&PORTALE,%20Giuseppe&NAVARRO,%20Christophe&rft.genre=article


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