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Straightforward integration flow of a silicon containing block copolymer for line-space patterning
| dc.rights.license | open | |
| hal.structure.identifier | Laboratoire des technologies de la microélectronique [LTM ] | |
| dc.contributor.author | LEGRAIN, A. | |
| hal.structure.identifier | Laboratoire de Chimie des polymères organiques [LCPO] | |
| dc.contributor.author | FLEURY, Guillaume | |
| hal.structure.identifier | Laboratoire de Chimie des Polymères Organiques [LCPO] | |
| dc.contributor.author | MUMTAZ, M. | |
| dc.contributor.author | NAVARRO, C. | |
| hal.structure.identifier | Laboratoire des technologies de la microélectronique [LTM ] | |
| dc.contributor.author | ARIAS-ZAPATA, J. | |
| hal.structure.identifier | Groupement de recherches de Lacq [GRL] | |
| dc.contributor.author | CHEVALIER, X. | |
| dc.contributor.author | CAYREFOURCQ, I. | |
| hal.structure.identifier | Laboratoire des technologies de la microélectronique [LTM ] | |
| dc.contributor.author | ZELSMANN, M. | |
| dc.date.accessioned | 2020 | |
| dc.date.available | 2020 | |
| dc.date.issued | 2017 | |
| dc.identifier.issn | 1944-8244 | |
| dc.identifier.uri | https://oskar-bordeaux.fr/handle/20.500.12278/20035 | |
| dc.language.iso | en | |
| dc.publisher | Washington, D.C. : American Chemical Society | |
| dc.title.en | Straightforward integration flow of a silicon containing block copolymer for line-space patterning | |
| dc.type | Article de revue | |
| dc.subject.hal | Physique [physics] | |
| bordeaux.journal | ACS Applied Materials & Interfaces | |
| bordeaux.page | p. 43043 | |
| bordeaux.volume | vol. 9 | |
| bordeaux.hal.laboratories | Laboratoire de Chimie des Polymères Organiques (LCPO) - UMR 5629 | * |
| bordeaux.institution | Bordeaux INP | |
| bordeaux.institution | Université de Bordeaux | |
| bordeaux.peerReviewed | oui | |
| hal.identifier | hal-01825510 | |
| hal.version | 1 | |
| hal.origin.link | https://hal.archives-ouvertes.fr//hal-01825510v1 | |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=ACS%20Applied%20Materials%20&%20Interfaces&rft.date=2017&rft.volume=vol.%209&rft.spage=p.%2043043&rft.epage=p.%2043043&rft.eissn=1944-8244&rft.issn=1944-8244&rft.au=LEGRAIN,%20A.&FLEURY,%20Guillaume&MUMTAZ,%20M.&NAVARRO,%20C.&ARIAS-ZAPATA,%20J.&rft.genre=article |
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