A method of optimisation in modelling and design of solidly mounted resonator (SMR) by using Finite Element Method
Idioma
EN
Communication dans un congrès
Este ítem está publicado en
2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2022-07-11, Pont-a-Mousson. 2022-07p. 1-4
Resumen en inglés
The film bulk acoustic resonator (FBAR) is an emerging piezoelectric device, widely spreading for sensing applications and in many commercial products like cell phones for its high working frequency and small size. This ...Leer más >
Palabras clave
Geometry
Electrodes
Solid modeling
Three-dimensional displays
Shape
Computational modeling
Resonant frequency
Piezoelectric transducers
Piezoelectric devices
Solidly Mounted Resonator
Finite Element Method
Sensor application