A method of optimisation in modelling and design of solidly mounted resonator (SMR) by using Finite Element Method
Langue
EN
Communication dans un congrès
Ce document a été publié dans
2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2022-07-11, Pont-a-Mousson. 2022-07p. 1-4
Résumé en anglais
The film bulk acoustic resonator (FBAR) is an emerging piezoelectric device, widely spreading for sensing applications and in many commercial products like cell phones for its high working frequency and small size. This ...Lire la suite >
Mots clés
Geometry
Electrodes
Solid modeling
Three-dimensional displays
Shape
Computational modeling
Resonant frequency
Piezoelectric transducers
Piezoelectric devices
Solidly Mounted Resonator
Finite Element Method
Sensor application