Gas Phase Deposition and Characterization of (Si)-B-C Ceramics
| dc.rights.license | open | en_US |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | CHOLLON, Georges | |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | LANGLAIS, Francis | |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | BERJONNEAU, Jérôme | |
| dc.date.accessioned | 2023-10-25T08:11:21Z | |
| dc.date.available | 2023-10-25T08:11:21Z | |
| dc.date.issued | 2009 | |
| dc.date.conference | 2009-10 | |
| dc.identifier.uri | https://oskar-bordeaux.fr/handle/20.500.12278/184532 | |
| dc.description.abstractEn | B-C and Si-B-C coatings have been prepared by chemical vapour deposition (CVD) respectively from CH4/BCl3/H2 and MTS/BCl3/H2 precursor mixtures at low temperature (800-1050{degree sign}C) and reduced pressure (12kPa). The kinetic laws (including apparent activation energy and reaction orders) related to the deposition process were determined within the regime controlled by chemical reactions. A wide range of coatings, prepared in various CVD conditions, were characterized in terms of morphology (SEM), structure (TEM, Raman spectroscopy) and elemental composition (Auger electron spectroscopy), in the as-deposited state and after heat treatment. A correlation between the various experimental approaches has supported a discussion on the chemical steps involved in the deposition process. | |
| dc.language.iso | EN | en_US |
| dc.publisher | ECS | en_US |
| dc.title.en | Gas Phase Deposition and Characterization of (Si)-B-C Ceramics | |
| dc.type | Communication dans un congrès | en_US |
| dc.identifier.doi | 10.1149/1.3207571 | en_US |
| dc.subject.hal | Chimie/Matériaux | en_US |
| bordeaux.page | 15-21 | en_US |
| bordeaux.volume | 25 | en_US |
| bordeaux.hal.laboratories | Laboratoire des Composites Thermo Structuraux (LCTS) - UMR 5801 | en_US |
| bordeaux.issue | 8 | en_US |
| bordeaux.institution | Université de Bordeaux | en_US |
| bordeaux.institution | CNRS | en_US |
| bordeaux.institution | CEA | en_US |
| bordeaux.conference.title | 216th ECS Meeting | en_US |
| bordeaux.country | at | en_US |
| bordeaux.conference.city | Vienna | en_US |
| bordeaux.import.source | hal | |
| hal.identifier | hal-02326582 | |
| hal.version | 1 | |
| hal.invited | non | en_US |
| hal.proceedings | non | en_US |
| hal.popular | non | en_US |
| hal.audience | Internationale | en_US |
| hal.export | false | |
| workflow.import.source | hal | |
| dc.rights.cc | Pas de Licence CC | en_US |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.date=2009&rft.volume=25&rft.issue=8&rft.spage=15-21&rft.epage=15-21&rft.au=CHOLLON,%20Georges&LANGLAIS,%20Francis&BERJONNEAU,%20J%C3%A9r%C3%B4me&rft.genre=unknown |
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