Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping
| dc.rights.license | open | en_US |
| dc.contributor.author | YAMAGUCHI, Takafumi | |
| dc.contributor.author | USAMI, Naoto | |
| dc.contributor.author | MISUMI, Kei | |
| dc.contributor.author | TOYOKURA, Atsushi | |
| dc.contributor.author | HIGO, Akio | |
| dc.contributor.author | ONO, Shimpei | |
| dc.contributor.author | HWANG, Gilgueng | |
| dc.contributor.author | LARRIEU, Guilhem | |
| dc.contributor.author | IKEUCHI, Yoshiho | |
| dc.contributor.author | TIXIER-MITA, Agnes | |
| dc.contributor.author | SAITO, Ken | |
| hal.structure.identifier | Laboratoire de l'intégration, du matériau au système [IMS] | |
| dc.contributor.author | LEVI, Timothee
IDREF: 120819813 | |
| dc.contributor.author | MITA, Yoshio | |
| dc.date.accessioned | 2023-02-28T09:35:40Z | |
| dc.date.available | 2023-02-28T09:35:40Z | |
| dc.date.issued | 2022-07-29 | |
| dc.identifier.issn | 1057-7157 | en_US |
| dc.identifier.uri | https://oskar-bordeaux.fr/handle/20.500.12278/172117 | |
| dc.description.abstractEn | We present a self-deformable flexible tweezer capable of simultaneous mechanical handling and electrical measurements. The tweezer has a soft cantilever with the dimensions 2 mm ×8 mm × 75- 100 μm , and undergoes self-deformation. The device is shown to be successfully capable of detecting electrical signals by gently touching the surface and grasping a spherical bead. The device demonstrated the lowest working voltage (1.5 VDC), force suitable for soft gripping, and curvature radius of 2 mm, that was one of the smallest values compared to that of similar state-of-the-art devices. The device was fabricated using a unique and highly reliable process that was specifically developed to produce flexible cantilevers with novel ionic polymer-metal composites (IPMCs). The materials used were poly(vinylidene fluoride-co-trifluoroethylene) (PVDF-TrFE) and an ionic liquid (IL). The PVDF-TrFE/IL gel was prepared using acetone as the solvent and the gel was coated with silver nanowires as the electrodes. The actuator with a length of 8 mm and containing 50 wt% IL yielded the largest bending displacement of 7 mm and minimum curvature radius of 2 mm at 1.5 VDC. [2022-0026] | |
| dc.language.iso | EN | en_US |
| dc.subject.en | Electrical detection | |
| dc.subject.en | Flexible actuator | |
| dc.subject.en | Ionic liquid | |
| dc.subject.en | PVDF-TrFE | |
| dc.subject.en | Self-deformable cantilever | |
| dc.subject.en | Silver nanowire | |
| dc.subject.en | Soft gripping | |
| dc.title.en | Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping | |
| dc.type | Article de revue | en_US |
| dc.identifier.doi | 10.1109/JMEMS.2022.3187428 | en_US |
| dc.subject.hal | Sciences de l'ingénieur [physics] | en_US |
| bordeaux.journal | Journal of Microelectromechanical Systems | en_US |
| bordeaux.page | 802-812 | en_US |
| bordeaux.volume | 31 | en_US |
| bordeaux.hal.laboratories | IMS : Laboratoire de l'Intégration du Matériau au Système - UMR 5218 | en_US |
| bordeaux.issue | 5 | en_US |
| bordeaux.institution | Université de Bordeaux | en_US |
| bordeaux.institution | Bordeaux INP | en_US |
| bordeaux.institution | CNRS | en_US |
| bordeaux.peerReviewed | oui | en_US |
| bordeaux.inpress | non | en_US |
| bordeaux.import.source | hal | |
| hal.identifier | hal-03864769 | |
| hal.version | 1 | |
| hal.export | false | |
| workflow.import.source | hal | |
| dc.rights.cc | Pas de Licence CC | en_US |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Journal%20of%20Microelectromechanical%20Systems&rft.date=2022-07-29&rft.volume=31&rft.issue=5&rft.spage=802-812&rft.epage=802-812&rft.eissn=1057-7157&rft.issn=1057-7157&rft.au=YAMAGUCHI,%20Takafumi&USAMI,%20Naoto&MISUMI,%20Kei&TOYOKURA,%20Atsushi&HIGO,%20Akio&rft.genre=article |
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