OPTICAL AMMETER FOR INTEGRATED-CIRCUIT CHARACTERIZATION AND FAILURE ANALYSIS
AUCOUTURIER, J. L.
Laboratoire d'études de l'intégration des composants et systèmes électroniques [IXL]
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Laboratoire d'études de l'intégration des composants et systèmes électroniques [IXL]
Idioma
en
Article de revue
Este ítem está publicado en
Quality and Reliability Engineering International. 1995, vol. 11, n° 4, p. 247-251
Wiley
Resumen en inglés
The current which flows through the metal semiconductor interface of an ohmic contact produces a Peltier effect. This thermal effect has been optically detected and used for the development of an optical ammeter, the ...Leer más >
The current which flows through the metal semiconductor interface of an ohmic contact produces a Peltier effect. This thermal effect has been optically detected and used for the development of an optical ammeter, the determination of doping type of semiconductors and the homogeneity scanning upon integrated circuits.< Leer menos
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