OPTICAL AMMETER FOR INTEGRATED-CIRCUIT CHARACTERIZATION AND FAILURE ANALYSIS
AUCOUTURIER, J. L.
Laboratoire d'études de l'intégration des composants et systèmes électroniques [IXL]
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Laboratoire d'études de l'intégration des composants et systèmes électroniques [IXL]
Language
en
Article de revue
This item was published in
Quality and Reliability Engineering International. 1995, vol. 11, n° 4, p. 247-251
Wiley
English Abstract
The current which flows through the metal semiconductor interface of an ohmic contact produces a Peltier effect. This thermal effect has been optically detected and used for the development of an optical ammeter, the ...Read more >
The current which flows through the metal semiconductor interface of an ohmic contact produces a Peltier effect. This thermal effect has been optically detected and used for the development of an optical ammeter, the determination of doping type of semiconductors and the homogeneity scanning upon integrated circuits.Read less <
Origin
Hal imported