Laser probes for the thermal and thermomechanical characterisation of microelectronic devices
Language
en
Article de revue
This item was published in
Microelectronics Journal. 2001-10, vol. 32, n° 10-11, p. 891-898
Elsevier
English Abstract
This paper presents a review of some of the recent works that we have done on thermal characterisation of running electronic devices by laser probing. Both the single point probing and the surface imaging methodologies are ...Read more >
This paper presents a review of some of the recent works that we have done on thermal characterisation of running electronic devices by laser probing. Both the single point probing and the surface imaging methodologies are considered. Besides temperature mapping, laser point probing allows fault detection in integrated circuits. Electronic speckle pattern interferometry and shearography metholologies are presented, and examples of images of running power devices and this relation to the underlying thermomechanical stress are shown.Read less <
Origin
Hal imported