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Temperature variation mapping of a microelectromechanical system by thermoreflectance imaging
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | GRAUBY, Stéphane | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | DILHAIRE, S. | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | JOREZ, S. | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | CLAEYS, W. | |
| dc.date.issued | 2005-02 | |
| dc.identifier.issn | 0741-3106 | |
| dc.description.abstractEn | We present in this letter a cost effective noncontact imaging technique well adapted to measure the temperature variations on microelectromechanical systems. The setup is tested on a microheater constituted of a polysilicon resistor deposited on a dielectric membrane. Results concerning the temperature variations of this device are compared on one hand with simulation predictions, and on the other hand with thermoreflectance point measurements. From thermoreflectance images, we also estimate the values of the thermoreflectance coefficients of the polysilicon and of the dielectric. | |
| dc.language.iso | en | |
| dc.publisher | Institute of Electrical and Electronics Engineers | |
| dc.title.en | Temperature variation mapping of a microelectromechanical system by thermoreflectance imaging | |
| dc.type | Article de revue | |
| dc.identifier.doi | 10.1109/led.2004.841468 | |
| dc.subject.hal | Physique [physics] | |
| bordeaux.journal | IEEE Electron Device Letters | |
| bordeaux.page | 78-80 | |
| bordeaux.volume | 26 | |
| bordeaux.issue | 2 | |
| bordeaux.peerReviewed | oui | |
| hal.identifier | hal-01552717 | |
| hal.version | 1 | |
| hal.popular | non | |
| hal.audience | Internationale | |
| hal.origin.link | https://hal.archives-ouvertes.fr//hal-01552717v1 | |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=IEEE%20Electron%20Device%20Letters&rft.date=2005-02&rft.volume=26&rft.issue=2&rft.spage=78-80&rft.epage=78-80&rft.eissn=0741-3106&rft.issn=0741-3106&rft.au=GRAUBY,%20St%C3%A9phane&DILHAIRE,%20S.&JOREZ,%20S.&CLAEYS,%20W.&rft.genre=article |
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