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hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorGRAUBY, Stéphane
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorDILHAIRE, S.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorJOREZ, S.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorCLAEYS, W.
dc.date.issued2005-02
dc.identifier.issn0741-3106
dc.description.abstractEnWe present in this letter a cost effective noncontact imaging technique well adapted to measure the temperature variations on microelectromechanical systems. The setup is tested on a microheater constituted of a polysilicon resistor deposited on a dielectric membrane. Results concerning the temperature variations of this device are compared on one hand with simulation predictions, and on the other hand with thermoreflectance point measurements. From thermoreflectance images, we also estimate the values of the thermoreflectance coefficients of the polysilicon and of the dielectric.
dc.language.isoen
dc.publisherInstitute of Electrical and Electronics Engineers
dc.title.enTemperature variation mapping of a microelectromechanical system by thermoreflectance imaging
dc.typeArticle de revue
dc.identifier.doi10.1109/led.2004.841468
dc.subject.halPhysique [physics]
bordeaux.journalIEEE Electron Device Letters
bordeaux.page78-80
bordeaux.volume26
bordeaux.issue2
bordeaux.peerReviewedoui
hal.identifierhal-01552717
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-01552717v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=IEEE%20Electron%20Device%20Letters&rft.date=2005-02&rft.volume=26&rft.issue=2&rft.spage=78-80&rft.epage=78-80&rft.eissn=0741-3106&rft.issn=0741-3106&rft.au=GRAUBY,%20St%C3%A9phane&DILHAIRE,%20S.&JOREZ,%20S.&CLAEYS,%20W.&rft.genre=article


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