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hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorGRAUBY, S.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorSALHI, A.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorRAMPNOUX, Jean-Michel
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorCLAEYS, W.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorDILHAIRE, S.
dc.date.issued2008
dc.date.conference2008-09-24
dc.description.abstractEnWe present a scanning imaging system using galvanometric mirrors dedicated to the thermomechanical imaging of microelectronic devices. Using a classical He-Ne laser as source, it constitutes a scanning thermoreflectance imaging set-up leading to images of reflectivity relative variations proportional to the device surface temperature variations. Using an heterodyne interferometric probe, it becomes a scanning interferometric set-up leading to surface displacement images. Both thermoreflectance and interferometric images are presented for two samples.
dc.language.isoen
dc.title.enLaser Scanning Thermomechanical Imaging of Microelectronic Devices
dc.typeCommunication dans un congrès
dc.identifier.doi10.1109/THERMINIC.2008.4669905
dc.subject.halPhysique [physics]
bordeaux.page183-189
bordeaux.countryIT
bordeaux.conference.cityRome
bordeaux.peerReviewednon
hal.identifierhal-01553682
hal.version1
hal.invitednon
hal.proceedingsoui
hal.conference.end2008-09-26
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-01553682v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.date=2008&rft.spage=183-189&rft.epage=183-189&rft.au=GRAUBY,%20S.&SALHI,%20A.&RAMPNOUX,%20Jean-Michel&CLAEYS,%20W.&DILHAIRE,%20S.&rft.genre=unknown


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