Si and SiGe Nanowires: Fabrication Process and Thermal Conductivity Measurement by 3ω-Scanning Thermal Microscopy
PUYOO, Etienne
Laboratoire Ondes et Matière d'Aquitaine [LOMA]
Laboratoire des Composants pour la Récupération d'Énergies [LCRE]
Institut des Nanotechnologies de Lyon [INL]
See more >
Laboratoire Ondes et Matière d'Aquitaine [LOMA]
Laboratoire des Composants pour la Récupération d'Énergies [LCRE]
Institut des Nanotechnologies de Lyon [INL]
PUYOO, Etienne
Laboratoire Ondes et Matière d'Aquitaine [LOMA]
Laboratoire des Composants pour la Récupération d'Énergies [LCRE]
Institut des Nanotechnologies de Lyon [INL]
< Reduce
Laboratoire Ondes et Matière d'Aquitaine [LOMA]
Laboratoire des Composants pour la Récupération d'Énergies [LCRE]
Institut des Nanotechnologies de Lyon [INL]
Language
en
Article de revue
This item was published in
Journal of Physical Chemistry C. 2013, vol. 117, n° 17, p. 9025-9034
American Chemical Society
English Abstract
We have grown various samples of Si and SiGe nanowires (NWs), either by a classical vapor?liquid?solid (VLS) process or by chemical etching, to measure their thermal conductivity and thus evaluate their efficiency for ...Read more >
We have grown various samples of Si and SiGe nanowires (NWs), either by a classical vapor?liquid?solid (VLS) process or by chemical etching, to measure their thermal conductivity and thus evaluate their efficiency for thermoelectrics applications. To do so, we have chosen a 3ω-Scanning Thermal Microscopy (SThM) imaging technique which is until now the only method able to perform topographical and thermal measurements simultaneously on an assembly of individual NWs, leading to a statistical value of their thermal conductivity. A size effect is clearly observed on Si NWs: 50 nm diameter NWs offer a reduced thermal conductivity in comparison with 200 nm diameter or even larger NWs. On the contrary, the thermal conductivity of SiGe NWs is widely reduced in comparison with the SiGe bulk value, even for large diameters, bigger than Si NWs ones. We discuss our results, comparing them with thermal conductivity values from the literature obtained by other measurement methods or models.Read less <
ANR Project
Etude de l'amplification de la Conduction Thermique dans des Réseaux de Nanoparticules - ANR-06-NANO-0020
Origin
Hal imported