Quantitative thermoreflectance imaging : calibration method and validation on a dedicated integrated circuit
Langue
en
Communication dans un congrès
Ce document a été publié dans
International Worshop on THERMal INvestigations of ICs and Systems, International Worshop on THERMal INvestigations of ICs and Systems, THERMINIC 2005, 2005-09, Belgirate, Lago Maggiore. 2005-09p. 290-293
TIMA Editions
Résumé en anglais
We have developed a CCD-based thermoreflectance microscope which can deliver thermal images of working integrated circuits.
Mots clés en anglais
Thermoreflectance
thermal mapping