Afficher la notice abrégée

Ba0.6Sr0.4TiO3 thin films deposited by spray coating for high capacitance density capacitors

hal.structure.identifierUniversité de Sherbrooke [UdeS]
hal.structure.identifierLaboratoire Nanotechnologies Nanosystèmes [LN2 ]
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorTETSI, Emmanuel
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorPHILIPPOT, Gilles
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorBORD MAJEK, Isabelle
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorAYMONIER, Cyril
hal.structure.identifierIBM Bromont
dc.contributor.authorAUDET, Jean
hal.structure.identifierIBM Bromont
dc.contributor.authorLEMIRE, Roxan
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
hal.structure.identifierLaboratoire Nanotechnologies Nanosystèmes [LN2 ]
dc.contributor.authorBECHOU, Laurent
hal.structure.identifierUniversité de Sherbrooke [UdeS]
hal.structure.identifierLaboratoire Nanotechnologies Nanosystèmes [LN2 ]
hal.structure.identifierInstitut Interdisciplinaire d'Innovation Technologique [Sherbrooke] [3IT]
dc.contributor.authorDROUIN, Dominique
dc.date.issued2018-10
dc.identifier.issn0031-8965
dc.description.abstractEnMetal‐insulator‐metal (MIM) capacitors with Ba0.6Sr0.4TiO3 (BST) thin films as insulating layers are fabricated using a novel, fast, and low‐cost method. On one hand, the process lies in the swift, continuous, and scalable synthesis of BST nanoparticles using the supercritical fluid technology and, on the other hand, the nonpyrolytic spray coating of thin films using colloidal nanocrystals as ink. The authors focus on the deposition process of thin and uniform layer. A dispersed colloidal suspension based on BST nanoparticles is deposited on a hot copper substrate. A 200 nm thick dielectric film is successfully obtained. Electrical characterizations of Cu/BST/Al MIM structure demonstrate a state‐of‐the‐art capacitance density almost reaching 1 µF cm−2 within an operating voltage range of ±1 V. Moreover, an annealing process of the dielectric layer and the final MIM capacitor at 90 °C during 15 h brings a significant decrease of the leakage current by three decades from mA cm−2 to µA cm−2.
dc.language.isoen
dc.publisherWiley
dc.title.enBa0.6Sr0.4TiO3 thin films deposited by spray coating for high capacitance density capacitors
dc.typeArticle de revue
dc.identifier.doi10.1002/pssa.201800478
dc.subject.halSciences de l'ingénieur [physics]/Electronique
dc.subject.halChimie/Matériaux
bordeaux.journalphysica status solidi (a)
bordeaux.page1800478 (11 p.)
bordeaux.volume215
bordeaux.issue23
bordeaux.peerReviewedoui
hal.identifierhal-01890960
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-01890960v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=physica%20status%20solidi%20(a)&rft.date=2018-10&rft.volume=215&rft.issue=23&rft.spage=1800478%20(11%20p.)&rft.epage=1800478%20(11%20p.)&rft.eissn=0031-8965&rft.issn=0031-8965&rft.au=TETSI,%20Emmanuel&PHILIPPOT,%20Gilles&BORD%20MAJEK,%20Isabelle&AYMONIER,%20Cyril&AUDET,%20Jean&rft.genre=article


Fichier(s) constituant ce document

FichiersTailleFormatVue

Il n'y a pas de fichiers associés à ce document.

Ce document figure dans la(les) collection(s) suivante(s)

Afficher la notice abrégée