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Structural and mechanical characterization of hybrid metallic-inorganic nanosprings

hal.structure.identifierÉquipe Microsystèmes électromécaniques [LAAS-MEMS]
dc.contributor.authorHABTOUN, Sabrina
hal.structure.identifierÉquipe NanoBioSystèmes [LAAS-NBS]
dc.contributor.authorHOUMADI, Saïd
hal.structure.identifierService Techniques et Équipements Appliqués à la Microélectronique [LAAS-TEAM]
dc.contributor.authorREIG, Benjamin
hal.structure.identifierChimie et Biologie des Membranes et des Nanoobjets [CBMN]
dc.contributor.authorPOUGET, Emilie
hal.structure.identifierChimie et Biologie des Membranes et des Nanoobjets [CBMN]
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorDEDOVETS, Dmytro
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorDELVILLE, Marie-Hélène
hal.structure.identifierChimie et Biologie des Membranes et des Nanoobjets [CBMN]
dc.contributor.authorODA, Reiko
hal.structure.identifierÉquipe Matériaux et Procédés pour la Nanoélectronique [LAAS-MPN]
dc.contributor.authorCRISTIANO, Fuccio
hal.structure.identifierÉquipe Microsystèmes électromécaniques [LAAS-MEMS]
dc.contributor.authorBERGAUD, Christian
dc.date.issued2017-10-01
dc.description.abstractEnSilica nanosprings (NS) are fabricated by a sol–gel deposition of silica precursors onto a template made of self-assembled organic chiral nanostructures. They are deposited and assembled on microstructured silicon substrates, and then metallized and clamped in a single lithography-free step using a focused ion beam (FIB). The resulting suspended hybrid metallic/inorganic NS are then characterized with high-resolution transmission electron microscopy (HRTEM) and scanning TEM/energy-dispersive X-ray spectroscopy (STEM/EDX), showing the atomic structure of the metallic layer. Three-point bending tests are also carried out using an atomic force microscope (AFM) and supported by finite element method (FEM) simulation with COMSOL Multiphysics allowing the characterization of the mechanical behavior and the estimation of the stiffness of the resulting NS. The information obtained on the structural and mechanical properties of the NS is discussed for future nano-electro-mechanical system (NEMS) applications.
dc.description.sponsorshipNanohélices hybrides organiques–inorganiques fonctionnelles : étude de phénomènes exaltés à l'échelle nanométrique
dc.description.sponsorshipAssemblage de type " bottom-up " de Nanohélices fonctionnalisées: un pas de plus vers des dispositifs flexibles. - ANR-15-CE08-0041
dc.language.isoen
dc.publisherIOP Publishing Ltd
dc.subject.enatomic force spectroscopy
dc.subject.ennanomechanics
dc.subject.ennanostructure
dc.subject.ennanohelix
dc.subject.ennanospring
dc.subject.enEBID
dc.subject.enFIB
dc.title.enStructural and mechanical characterization of hybrid metallic-inorganic nanosprings
dc.typeArticle de revue
dc.identifier.doi10.1088/2053-1591/aa8e1a
dc.subject.halChimie/Matériaux
bordeaux.journalMaterials Research Express
bordeaux.volume4
bordeaux.issue10
bordeaux.peerReviewedoui
hal.identifierhal-01651965
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-01651965v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Materials%20Research%20Express&rft.date=2017-10-01&rft.volume=4&rft.issue=10&rft.au=HABTOUN,%20Sabrina&HOUMADI,%20Sa%C3%AFd&REIG,%20Benjamin&POUGET,%20Emilie&DEDOVETS,%20Dmytro&rft.genre=article


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