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Tunability, dielectric, and piezoelectric properties of Ba(1−x)CaxTi(1−y)ZryO3 ferroelectric thin films

hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN - UMR 7347]
dc.contributor.authorDAUMONT, Christophe
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorSIMON, Quentin
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN - UMR 7347]
dc.contributor.authorLE MOUELLIC, Erwan
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorPAYAN, Sandrine
hal.structure.identifierSTMicroelectronics [Tours] [ST-TOURS]
dc.contributor.authorGARDES, Pascal
hal.structure.identifierSTMicroelectronics [Tours] [ST-TOURS]
dc.contributor.authorPOVEDA, Patrick
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN - UMR 7347]
dc.contributor.authorNEGULESCU, Béatrice
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorMAGLIONE, Mario
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN - UMR 7347]
dc.contributor.authorWOLFMAN, Jérôme
dc.date.issued2016
dc.identifier.issn0021-8979
dc.description.abstractEnTunable ferroelectric capacitors, which exhibit a decrease of the dielectric permittivity (ϵ) under electric field, are widely used in electronics for RF tunable applications (e.g., antenna impedance matching). Current devices use barium strontium titanate as the tunable dielectric, and the need for performance enhancement of the tunable element is the key for device improvement. We report here on libraries of Ba0.97Ca0.03Ti1−xZrxO3thin films (0 ≤ x ≤ 27%) with a thickness of about 130 nm deposited on IrO2/SiO2/Si substrates using combinatorial pulsed laser deposition allowing for gradients of composition on one sample. A total of 600 capacitors on a single sample were characterized in order to statistically investigate the dielectric properties. We show that the tunabilty is maximum at intermediate compositions, reaching values up to 60% for an electric field of about 400 kV cm−1. We attribute the high tunability in the intermediate compositions to the paraelectric-ferroelectric phase transition, which is brought down to room temperature by the addition of Zr. In addition, the piezoelectric coefficient is found to be decreasing with increasing Zr content.
dc.language.isoen
dc.publisherAmerican Institute of Physics
dc.subject.enMaterials
dc.subject.enCapacitance
dc.subject.enDoping
dc.subject.enPiezoelectricity
dc.subject.enElectrical properties
dc.subject.enCondensed matter properties
dc.subject.enDielectrics
dc.subject.enFerroelectricity
dc.subject.enFerroelectric phase transitions
dc.subject.enPhase transitions
dc.title.enTunability, dielectric, and piezoelectric properties of Ba(1−x)CaxTi(1−y)ZryO3 ferroelectric thin films
dc.typeArticle de revue
dc.identifier.doi10.1063/1.4942924
dc.subject.halPhysique [physics]/Matière Condensée [cond-mat]/Science des matériaux [cond-mat.mtrl-sci]
bordeaux.journalJournal of Applied Physics
bordeaux.page094107 (8 p.)
bordeaux.volume119
bordeaux.issue9
bordeaux.peerReviewedoui
hal.identifierhal-01309603
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-01309603v1
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