Stress and phase purity analyses of diamond films deposited through laser-assisted combustion synthesis
GUILLEMET, Thomas
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
Department of Electrical Engineering
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Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
Department of Electrical Engineering
GUILLEMET, Thomas
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
Department of Electrical Engineering
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
Department of Electrical Engineering
VEILLERE, Amélie
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
Department of Electrical Engineering
< Reduce
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
Department of Electrical Engineering
Language
en
Article de revue
This item was published in
ACS Applied Materials & Interfaces. 2011, vol. 3, n° 10, p. 4120-4125
Washington, D.C. : American Chemical Society
English Abstract
Diamond films were deposited on silicon and tungsten carbide substrates in open air through laser-assisted combustion synthesis. Laser-induced resonant excitation of ethylene molecules was achieved in the combustion process ...Read more >
Diamond films were deposited on silicon and tungsten carbide substrates in open air through laser-assisted combustion synthesis. Laser-induced resonant excitation of ethylene molecules was achieved in the combustion process to promote diamond growth rate. In addition to microstructure study by scanning electron microscopy, Raman spectroscopy was used to analyze the phase purity and residual stress of the diamond films. High-purity diamond films were obtained through laser-assisted combustion synthesis. The levels of residual stress were in agreement with corresponding thermal expansion coefficients of diamond, silicon, and tungsten carbide. Diamond-film purity increases while residual stress decreases with an increasing film thickness. Diamond films deposited on silicon substrates exhibit higher purity and lower residual stress than those deposited on tungsten carbide substrates.Read less <
English Keywords
Diamond films
Laser-assisted combustion synthesis
Laser-induced resonant excitation
Raman spectroscopy
Residual stress
Origin
Hal imported