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Screen-Printed Microcantilevers Coated with Functionalized Mesocellular Foam Silica for Detection of Solvent Vapors

dc.rights.licenseopenen_US
dc.contributor.authorSANTAWITEE, Onuma
IDREF: 228324963
dc.contributor.authorCHAYASOMBAT, Bralee
dc.contributor.authorTHANACHAYANONT, Chanchana
dc.contributor.authorINPOR, Kroekchai
dc.contributor.authorPRICHANONT, Seeroong
dc.contributor.authorKLINTHONGCHAI, Yoottapong
dc.contributor.authorPHONGPHUT, Angkana
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorDEBEDA, Helene
dc.date.accessioned2022-08-29T12:16:25Z
dc.date.available2022-08-29T12:16:25Z
dc.date.issued2022-01-01
dc.identifier.issn1530-437Xen_US
dc.identifier.otherhttps://ieee-dataport.org/documents/supporting-documenten_US
dc.identifier.urioai:crossref.org:10.1109/jsen.2022.3193460
dc.identifier.urihttps://oskar-bordeaux.fr/handle/20.500.12278/140604
dc.description.abstractEnThis work presents an application of mass-sensitive microcantilevers coated with a new alternative of sensitive materials that is hexamethyldisilazane functionalized mesocellular foam silica (HMDS-MCF-Si) for detection of solvent vapors. The microcantilevers (3 mm × 2 mm × 0.1 mm) based on a lead zirconate titanate (PZT) beam sandwiched by thin gold (Au) electrodes were fabricated by screen-printing. Mesocellular foam silica (MCF-Si) was synthesized and used as the sensitive material due to its high specific surface area and pore volume. This material was functionalized by hexamethyldisilazane (HMDS) to enhance hydrophobicity. By a small deposition of HMDS-MCF-Si, the obtained devices demonstrated longitudinal vibration mode with the quality factor of approximately 200 at ambient temperatures. Responsiveness of the microcantilever coated with HMDS-MCF-Si to each solvent vapor at room temperature was compared. The largest response was obtained from exposure to toluene vapor with the sensitivity of 0.85 ppm/ppmV (218 mHz/ppmV) and a limit of detection (LOD) of 28 ppmV. The sensitivity dropped by almost six times when exposed to the higher polar vapor of ethanol. Very low response to water vapor (0.05 ppm/ppmV) confirmed the hydrophobic behavior of HMDS-MCF-Si. Detectable performances under different vapors of our device can be utilized as a guide for developing sensitive materials and resonant microcantilever-based vapor sensors.
dc.language.isoENen_US
dc.sourcecrossref
dc.subject.enMicrocantilever
dc.subject.enScreen-printing technology
dc.subject.enMesocellular foam silica
dc.subject.enResonant frequency
dc.subject.enPiezoelectric device
dc.title.enScreen-Printed Microcantilevers Coated with Functionalized Mesocellular Foam Silica for Detection of Solvent Vapors
dc.typeArticle de revueen_US
dc.identifier.doi10.1109/jsen.2022.3193460en_US
dc.subject.halSciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectroniqueen_US
bordeaux.journalIEEE Sensors Journalen_US
bordeaux.page1-1en_US
bordeaux.hal.laboratoriesLaboratoire d’Intégration du Matériau au Système (IMS) - UMR 5218en_US
bordeaux.institutionUniversité de Bordeauxen_US
bordeaux.institutionBordeaux INPen_US
bordeaux.institutionCNRSen_US
bordeaux.peerReviewedouien_US
bordeaux.inpressnonen_US
bordeaux.import.sourcedissemin
hal.identifierhal-03763342
hal.version1
hal.date.transferred2022-08-29T12:16:28Z
hal.exporttrue
workflow.import.sourcedissemin
dc.rights.ccPas de Licence CCen_US
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=IEEE%20Sensors%20Journal&rft.date=2022-01-01&rft.spage=1-1&rft.epage=1-1&rft.eissn=1530-437X&rft.issn=1530-437X&rft.au=SANTAWITEE,%20Onuma&CHAYASOMBAT,%20Bralee&THANACHAYANONT,%20Chanchana&INPOR,%20Kroekchai&PRICHANONT,%20Seeroong&rft.genre=article


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